No.536, Jianguo Rd., Yingge Dist., New Taipei City 23943, Taiwan (R.O.C.)

Flux Cleaner


  • 2 types of Flux cleaner:1. Rotation machine; 2. Public rotation machine.  Applicated on Bumping、2.5D IC、3D IC.
  • Rosin flux or water-soluble flux is generally used on bumping process.
         1. Rosin flux products are recommended to be cleaned with KOH/Ethanol/Isopropyl-alcohol.
         2. Water-soluble flux products are recommended to be cleaned with pure water atomization system.
  • Product drying method: Nitrogen drying, IPA drying or hot plate drying.


  • Programmable multi-axis swing-arm system.
  • Pure water can be atomized to 7~9um.
  • Different product carrier design, such as wafer form、Frame form、Panel form.
  • Matched all Equipment Front End Module (EFEM).
  • Option:Acid-mixed system、thermostat system and chemical recycled system.
  • Special explosion-proof safety device and design.
  • SEMI-S2 certification.
  • Equipment model:1-chamber、2-chamber and 4-chamber.
  •  Applicable

  • 2"、4"、6"、8" and 12".