- Applicated on PR stripper、Metal lift off、Molding compound remove).
- Adopt chemical atomization and the chemical permeate PR or molding compound quickly.
- The chemical atomization system can reduce the usage of chemical effectively and improve product stability.
- With special jet method and thermostat system, it can control the process parameters accurately.
- Programmable multi-axis swing-arm system.
- Pure water can be atomized to 7~9um.
- Different product carrier design, such as wafer form、Frame form、Panel form.
- Matched all Equipment Front End Module (EFEM).
- Option：Acid-mixed system、thermostat system and chemical recycled system.
- Special explosion-proof safety device and design.
- SEMI-S2 certification.
- Equipment model：1-chamber、2-chamber and 4-chamber.
2"、4"、6"、8" and 12".